Combination Unit: Dampening Water Circulation and Roller Temperature Control

SPACE PAIR Series

Features　　

  • 　Combined dampening water circulation function and roller cooling function
  • 　Energy-saving design with inverter chiller
  • 　Touch panel batch control operation

ー　Specification

Power Supply3-Phase 200V
Temperature ControlHeating/ Cooling Control
Etch ControlChange-over of Etch Density Control Mode and pH Monitoring Mode
IPA ControlIPA Control Device [alcon]
Error DisplayError Indication and Buzzer

For more detailed specifications, please download the catalog or contact us.

SPACE PAIR ECO

SPACE PAIR ECO UV

ECO Series
Catalogue
H-UV Series
Catalogue
Inquiry Form

*Specifications are subject to change without notice.